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INA - Nanophotonics > Publications

Books

  • N. Götte, T. Kusserow, T. Winkler, C. Sarpe, L. Englert, D. Otto, T. Meinl, Y. Khan, B. Zielinski, A. Senftleben, M. Wollenhaupt, H. Hillmer, and T. Baumert, “Temporally shaped femtosecond laser pulses for creation of functional sub-100 nm structures in dielectrics,” in Optically Induced Nanostructures, K. König and A. Ostendorf, Eds. Berlin: de Gruyter, 2015, pp. 47–72.

  • T. Meinl, N. Götte, Y. Khan, T. Kusserow, C. Sarpe, J. Köhler, M. Wollenhaupt, A. Senftleben, T. Baumert, and H. Hillmer, “Material processing of dielectrics via temporally shaped femtosecond laser pulses as direct patterning method for nanophotonic applications,” in NATO Nanoscience Advances in CBRN Agents Detection, Information and Energy Security, P. Petkov, D. Tsiulyanu, W. Kulisch, and C. Popov, Eds. Dodrecht: Springer Science+ Business Media, 2014, pp. 29–34.

  • H. Hillmer and T. Kusserow, “Semiconductor Lasers,” in Springer Handbook of Lasers and Optics, 2nd ed., F. Träger, Ed. Berlin, Heidelberg: Springer, 2012, pp. 757–792.

  • T. Kusserow, Periodic InP/Air Structures in Optical Filter Devices. Aachen: Shaker Verlag, 2011.

  • T. Kusserow, M. Wulf, R. Zamora, B. Vengatesan, B. Witzigmann, and H. Hillmer, “Photonic Crystal Polarizer Element on InP/Air Membranes for Optical MEMS Applications,” in Compound Semiconductor Photonics, S.-J. Chua, J. Teng, and A. Danner, Eds. Singapore: Pan Stanford, 2010, pp. 66–68.

  • H. Hillmer, Y. Wang, T. Kusserow, S. Irmer, N. Dharmarasu, A. Hasse, M. Bartels, M. Schwarz, J. Börcsök, and O. Mikami, “Optoelectronic technologies for optical data communication in safety computer systems for process control and fabrication,” in Risk, reliability and Societal Safety, T. Aven and J. E. Vinnem, Eds. Taylor & Francis, 2007, pp. 377–384.

Journals

  • M. Taimoor, A. Alatawi, S. Reuter, H. Hillmer and Thomas Kusserow, "Single-step inductively coupled plasma etching of sputtered Nb2O5/SiO2 multilayer stacks using chromium etch mask," Journal of Vacuum Science & Technology A, 35, pp. 041302, 2017. dx.doi.org/10.1116/1.4983683
  • M. Taimoor, S. Reuter, H. Hillmer, and T. Kusserow, “Narrowband optical thin-film filters with distributed cavity modes,” Appl. Phys. A, vol. 122, no. 5, p. 538, 2016. dx.doi.org/10.1007/s00339-016-9617-6

  • N. Götte, T. Winkler, T. Meinl, T. Kusserow, B. Zielinski, C. Sarpe, A. Senftleben, H. Hillmer, and T. Baumert, “Temporal Airy pulses for controlled high aspect ratio nanomachining of dielectrics,” Optica, vol. 3, no. 4, pp. 389–395, 2016. dx.doi.org/10.1364/OPTICA.3.000389

  • M. Abdel-Awwad, H. Luan, F. Messow, T. Kusserow, A. Wiske, A. Siebert, T. Fuhrmann-Lieker, J. Salbeck, and H. Hillmer, “Optical amplification and photodegradation in films of spiro-quaterphenyl and its derivatives,” J. Lumin., vol. 159, pp. 47–54, 2015. dx.doi.org/10.1016/j.jlumin.2014.10.065

  • F. Messow, C. Welch, A. Eifert, W. C. Ang, N. S. Hoe, T. Kusserow, and H. Hillmer, “Deep single step vertical ICP–RIE etching of ion beam sputter deposited SiO2/Si multilayer stacks,” Microelectron. Eng., vol. 113, pp. 70–73, 2014. dx.doi.org/10.1016/j.mee.2013.07.018

  • T. Kusserow, M. Wulf, R. Zamora, K. Kanwar, H. Hillmer, “Processing of photonic crystals in InP membranes by focused ion beam milling and plasma etching,” Microelectron. Eng., vol. 102, pp. 28–28, 2013. dx.doi.org/10.1016/j.mee.2012.02.019

  • U. Akcakoca, B. Witzigmann, R. Zamora, T. Kusserow, and H. Hillmer, “Frequency domain analysis of modes in a photonic crystal micro-opto-electro-mechanical system with periodically arranged circular holes,” Opt. Quantum Electron., vol. 44, no. 3–5, pp. 273–277, 2012. dx.doi.org/10.1007/s11082-012-9550-7

  • T. Kusserow, S. Irmer, N. Dharmarasu, H. Hillmer, and B. Vengatesan, “Tunable Fabry-Perot-filters based on InP/air-gap mirrors,” Photonik Int., no. 1, pp. 14–16, 2009.

  • T. Kusserow, S. Irmer, N. Dharmarasu, H. Hillmer, and B. Vengatesan, “Weit durchstimmbare Fabry-Perot-Filter mit InP/Luft-Spiegeln,” Photonik, vol. 39, no. 6, pp. 64–66, 2007.

  • H. Hillmer, T. Kusserow, N. Dharmarasu, A. Hasse, M. Bartels, Y. Wang, S. Irmer, and O. Mikami, “Wavelength division multiplexing (WDM) for secure optical data communication in industrial computers, process control and fabrication systems,” in WSEAS Transactions on Communications, vol. 6, no. 2, pp. 107–109, 2006.

Conferences

  • L. Wetterau, Z. Yi, N. Dharmarasu, K. Radhakrishnan, M. Agrawal, T. Kusserow, "Optical Characterization of Highly-doped GaN Layers by Spectroscopic Ellipsometry," ICMAT 2017, 2017, V2-12 (3)
  • L. Wetterau, L. Ravikiran, N. Dharmarasu, K. Radhakrishnan, M. Agrawal, and T. Kusserow, “Characterization of Highly-Doped GaN as a New Material for Plasmonic Applications,” in IEEE Interantional Conference on Optical MEMS and Nanophotonics, 2016, pp. 287–288.

  • H. Wilke, C. Heume, S. Alfihed, N. Hoinka, T. Fuhrmann-Lieker, T. Kusserow, and H. Hillmer, “Hybrid Vertical Cavity Surface-Emitting Laser in the Ultraviolet Spectral Range,” in IEEE Interantional Conference on Optical MEMS and Nanophotonics, 2016, pp. 115–116.

  • S. Reuter, M. Taimoor, H. Hillmer, and T. Kusserow, “Distribution of Cavity-modes in Narrowband Filters with Chirped Thin-Films,” in dgao-proceedings, 2016, p. A23.

  • L. Wetterau and T. Kusserow, “Investigation on Low-loss Materials for Plasmonic Applications,” in dgao-proceedings, 2016, p. P2.

  • T. Kusserow, M. Taimoor, S. Reuter, and H. Hillmer, “Narrowband Chirped Thin Film Filters with Distributed Cavity,” in IEEE Optical MEMS and Nanophotonics Conference, 2015, p. MO2.5 1–2. dx.doi.org/10.1109/OMN.2015.7288828

  • M. Taimoor, A. Alatawi, S. Reuter, H. Hillmer, and T. Kusserow, “Investigation of a Structuring Process for Surface Emitting Lasers (CoreSEL) with Distributed Cavities,” in ICMAT 2015, 2015, pp. T2–4.

  • T. Kusserow, R. Zamora, and H. Hillmer, “A Comparison of Thin-Film Materials as Hard Mask Layer for Nanostructure Fabrication by Focused Ion Beam Milling and Plasma Etching,” in ICMAT 2015, 2015, p. T–PO3–29.

  • M. Taimoor, S. Reuter, H. Hillmer, and T. Kusserow, “Narrowband Optical Thin-film Filters with Distributed Cavity Modes,” in ICMAT 2015, 2015, p. K–PO2–16.

  • Y. Khan, N. Götte, T. Meinl, T. Kusserow, A. Senftleben, T. Baumert, and H. Hillmer, “Modelling, Design and Fabrication of Dielectric Photonic Crystal Structures Using Temporally Asymmetric Shaped Femtosecond Laser Pulses,” in International Conference on Optical MEMS and Nanophotonics, 2014, pp. 207–208. dx.doi.org/10.1109/OMN.2014.6924525

  • T. Meinl, N. G. Götte, Y. Khan, T. Kusserow, C. Sarpe, J. Köhler, M. Wollenhaupt, A. Senftleben, T. Baumert, and H. Hillmer, “Temporally shaped femtosecond laser pulses as direct patterning method for dielectric materials in nanophotonic applications,” in Proc. SPIE 9126, Nanophotonics V, 2014, p. 91262B. dx.doi.org/10.1117/12.2051749

  • N. Götte, T. Winkler, C. Sarpe, B. Zielinski, J. Köhler, T. Kusserow, T. Meinl, Y. Khan, H. Hillmer, M. Wollenhaupt, A. Senftleben, and T. Baumert, “Real Time Observation of Transient Electron Density in High Bandgap Dielectrics Irradiated with Tailored Femtosecond Laser Pulses,” in DPG Frühjahrstagung, 2014.

  • T. Meinl, N. Götte, Y. Khan, T. Kusserow, C. Sarpe, J. Köhler, M. Wollenhaupt, A. Senftleben, T. Baumert, and H. Hillmer, “Material processing of dielectrics via temporally shaped femtosecond laser pulses as direct patterning method for nanophotonic applications,” in NATO Nanaocsience Advances in CBRN Agents Detection, Information and Energy Security, 2014.

  • N. Götte, C. Sarpe, J. Köhler, T. Kusserow, T. Meinl, Y. Khan, H. Hillmer, M. Wollenhaupt, and T. Baumert, “Generation of Functional Structures in Dielectrics on the Nanometer Scale via Shaped Femtosecond Laser Pulses,” in Conference on Laser Ablation (COLA), 2013, pp. P1–02.

  • N. Götte, C. Sarpe, J. Köhler, L. Englert, D. Otto, T. Kusserow, T. Meinl, Y. Khan, H. Hillmer, M. Wollenhaupt, and T. Baumert, “Generation of Functional Structures in Dielectrics on Nanometer Scale via Shaped Femtosecond Laser Pulses,” in DPG Frühjahrstagung, 2013.

  • T. Kusserow, S. Schudy, M. Taimoor, T. Meinl, and H. Hillmer, “Narrowband Chirped Optical Filters with Distributed Cavity Modes,” in ICMAT 2013, 2013, p. ICMAT13–A–1631.

  • T. Kusserow, N. Götte, Y. Khan, T. Meinl, C. Sarpe, J. Köhler, S. Schudy, M. Wollenhaupt, T. Baumert, and H. Hillmer, “Dielectric Photonic Crystal Structures Fabricated by Direct Patterning with Shaped Femtosecond Laser Pulses,” in ICMAT 2013, 2013, p. ICMAT13–A–1626.

  • N. Götte, C. Sarpe, J. Köhler, L. Englert, D. Otto, T. Kusserow, T. Meinl, Y. Khan, H. Hillmer, M. Wollenhaupt, and T. Baumert, “Generation of Functional Structures in Dielectrics on Nanometer Scale via Shaped Femtosecond Laser Pulses,” in nano 3D, 2012.

  • T. Kusserow, Y. Khan, R. Zamora, F. Messow, and H. Hillmer, “Guided-mode Resonances in Dielectric Photonic Crystal Slabs with Low Index Contrast,” in IEEE Optical MEMS and Nanaophotonics Conference, 2012, pp. 170–171. dx.doi.org/10.1109/OMEMS.2012.6318857

  • U. Akcakoca, B. Witzigmann, R. Zamora, T. Kusserow, and H. Hillmer, “Design and Analysis of Polarization Selective Tunable Photonic Crystal Filters,” in NUSOD 2011, 2011, p. TuD4. dx.doi.org/10.1109/NUSOD.2011.6041178

  • R. Zamora, M. Benes, T. Kusserow, H. Hillmer, U. Akcakoca, and B. Witzigmann, “Optical Characterization of Photonic Crystals as Polarizing Structures for Tunable Optical MEMS Devices,” in IEEE Conference on Optical MEMS und Nanophotonics, 2011, pp. 83–84. dx.doi.org/10.1109/OMEMS.2011.6031069

  • T. Kusserow, M. Wulf, R. Zamora, K. Kanwar, and H. Hillmer, “Processing of photonic crystals in InP membranes by focused ion beam milling and plasma etching,” in ICMAT 2011, 2011, pp. BB7–3.

  • T. Kusserow, B. Schiel, and H. Hillmer, “Diffraktiv optische Elemente für künstlerische und darstellende Anwendungen,” in dgao-proceedings, 2011, p. A20.

  • T. Kusserow, R. Zamora, M. Wulf, U. Akcakoca, R. Marklein, B. Witzigmann, and H. Hillmer, “Polarisationsselektive InP MOEMS Filter mit Photonischen Kristallen,” in dgao-proceedings, 2011, p. B3.

  • T. Kusserow, M. I. Hafiz, M. A. Ahmed, T. Graf, and H. Hillmer, “Nanopatterning of Dielectric Thin-films on the Facets of Optical Fibers,” in ICMAT 2011, 2011, pp. J11.1–3.

  • R. Zamora, T. Kusserow, M. Wulf, K. Kanwar, B. Witzigmann and H. Hillmer, “Structuring of 2D Photonic Crystal on InP Membranes as Polarizing Element for Optical MEMS Based Sensor Systems,” in Proceedings of the INSS 2010, 2010, pp. 179–182. dx.doi.org/10.1109/INSS.2010.5572160

  • M. Wulf, T. Kusserow, R. Zamora, and H. Hillmer, “A Polarizing Element using the Guided-Mode Resonance in a Photonic Crystal Slab,” in 1st IEEE Germany Student Conference, 2009.

  • F. J. Messow, D. Todorov, T. Kusserow, S. Wittzack, F. Köhler, M. Bartels, and H. Hillmer, “Novel ultra-high 3D resolution surface structuring and thin film stress investigation,” in Verhandlungen der DPG 2009, 2009, p. SYOP 4.78.

  • M. Bartels, X. Wang, T. Kusserow, F. Koehler, S. Wittzack, and H. Hillmer, “3D nanoimprint templates with ultra-high vertical precision,” in ICMAT 2009 & IUMRS-ICA 2009, 2009, pp. A01859–03214.

  • T. Kusserow, M. Wulf, R. Zamora, B. Vengatesan, B. Witzigmann, and H. Hillmer, “Photonic Crystal Polarizer Element on InP/Air Membranes for Optical MEMS Applications,” in ICMAT 2009 & IUMRS-ICA 2009, 2009, pp. A01859–03213.

  • T. Kusserow, N. Dharmarasu, M. Wulf, and H. Hillmer, “Herstellung und Charakterisierung von nanophotonischen Strukturen mit Hilfe fokussierter Ionenstrahlen,” in dgao-proceedings.de, 2008, p. B36.

  • T. Kusserow, R. Zamora, J. Sonksen, N. Dharmarasu, H. Hillmer, T. Nakamura, T. Hayakawa, and B. Vengatesan, “Monolithic integration of a tunable photodetector based on InP/air-gap Fabry-Pérot filters,” in IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, 2008, 2008, pp. 134–135. dx.doi.org/10.1109/OMEMS.2008.4607865

  • T. Kusserow, S. Ferwana, T. Nakamura, T. Hayakawa, N. Dharmarasu, B. Vengatesan, and H. Hillmer, “Micromachining of InP/InGaAs multiple membrane/airgap structures for tunable optical devices,” in SPIE Proc. Vol. 6993, 2008, p. 69930B–11. dx.doi.org/10.1117/12.781359

  • H. Hillmer, V. Viereck, T. Kusserow, Y. Wang, S. Irmer, N. Dharmarasu, T. Todorov, A. Jäkel, Q. Li, A. Hasse, D. Bienhaus, and M. Bartels, “Nanophotonic devices and components: micromachined motion, fabrication, characterization, scaling potential and applications,” in Technical digest 3rd Shanghai International Nanotechnology Symposium 2007, 2007, p. 245.

  • H. Hillmer, T. Kusserow, N. Dharmarasu, S. Irmer, J. Daleiden, A. Hasse, M. Bartels, B. Vengatesan, and T. Hayakawa, “Micromachined tunable 1.55µm vertical cavity, multiple air-gap filters and lasers: fabrication, characterization, scaling potential and applications,” in Technical Digest, OECC/IOOC 2007 Yokohama, 2007, p. 428.

  • Y. Wang, T. Kusserow, S. Irmer, A. Hasse, M. Barrels, N. Dharmarasu, H. Hillmer, J. Börcsök, and O. Mikami, “Optics in Computer Architectures: Basis of WDM, Technologies and Potentials,” in Second International Conference on Systems (ICONS’07), 2007, pp. 50. dx.doi.org/10.1109/ICONS.2007.38

  • H. Hillmer, T. Kusserow, N. Dharmarasu, S. Irmer, J. Daleiden, M. Bartels, T. Nakamura, T. Hayakawa, B. Vengatesan, A. Hasse, and S. Hansmann, “Strain-balanced In(GaAs)P heterostructures for tunable multiple InP/air-gap DBR Fabry-Pérot filters,” in Proceedings of 20th Int. Conf. on Engineering Physics (ICEP), 2006, p. 18.

  • T. Kusserow, N. Dharmarasu, S. Irmer, H. Hillmer, T. Nakamura, T. Hayakawa, and B. Vengatesan, “Durchstimmbare Fabry-Perot Filter auf der Basis von InP/Luft DBR-Spiegeln,” in dgao-proceedings.de, 2006, p. B16.

  • T. Kusserow, N. Dharmarasu, H. Hillmer, T. Nakamura, T. Hayakawa, and B. Vengatesan, “Tailored Stress in InP/GaInAs Layers for InP/air-gap DBR-Filters with Photonic Crystals,” in IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006, 2006, pp. 88–89. dx.doi.org/10.1109/OMEMS.2006.1708278

  • T. Kusserow, M. Augustin, A. Bangert, and A. Tünnermann, “Zweidimensionale Photonische Kristalle für den sichtbaren Spektralbereich,” in DPG-Frühjahrstagung 2005, 2005, p. AKFH 1.8.

  • T. Kusserow, “Low-Index Contrast Photonic Crystal Slab Structures For The Visible Spectral Range,” in 9th International Student Conference on Electrical Engineering 2005, Prague, 2005, p. NS10.

Patents

  • T. Kusserow ; H. Hillmer: Optische Dünnschichtstruktur mit einer verteilten Kavität. DE 102009026449 B4 (2009).
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